A conductor-backed (CB) coplanar waveguide (CPW)-fed loop slot couples the energy to the patch antenna, resulting in a broad bandwidth. The feed circuitry, along with the loop, is formed on a quartz substrate (år = 3.9, tan ä = 0.0002 at 60 GHz), on top of which an SU-8-based three-dimensional (3-D) structure with air cavities is microfabricated. The patch metallization is deposited on top of this 3-D structure. While the main role of the structure made out of SU-8 material is to provide a mechanical support for the patch metallization, the antenna takes advantage of the air cavities underneath, thus resulting in an antenna substrate with a very low loss. This, in turn, improves the overall antenna performances. The simulated and measured impedance characteristics agree well, showing ~15 percent bandwidth. Also, the radiation pattern results demonstrate the integrity of radiation pattern with reasonably constant gain values (average ~6.4 dB) in the broadside direction over the entire WiGig band. (Publisher abstract modified)
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